ダウンロード数: 235

このアイテムのファイル:
ファイル 記述 サイズフォーマット 
s00542-013-1895-8.pdf839.8 kBAdobe PDF見る/開く
タイトル: Analytical investigation of the feasibility of sacrificial microchannel sealing for Chip-Scale Atomic Magnetometers
著者: Tsujimoto, Kazuya
Hirai, Yoshikazu  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0003-0835-7314 (unconfirmed)
Sugano, Koji
Tsuchiya, Toshiyuki  kyouindb  KAKEN_id  orcid https://orcid.org/0000-0002-7846-5831 (unconfirmed)
Tabata, Osamu  KAKEN_id
著者名の別形: 辻本, 和也
田畑, 修
発行日: Mar-2014
出版者: Springer Berlin Heidelberg
誌名: Microsystem Technologies
巻: 20
号: 3
開始ページ: 357
終了ページ: 365
抄録: An alkali metal vapor cell is a crucial component of the highly sensitive Chip Scale Atomic Magnetometers (CSAMs) that are increasingly deployed in a variety of electronic devices. Herein, we propose a novel microfabrication technique utilizing an array of microchannels at a bonded interface, to enable gas feedthrough for evacuation of unwanted gases from a vapor cell and subsequent introduction of an inert gas, followed by permanent sealing of the microchannels by reflow of a glass frit. The characteristics of glass frit reflow are analyzed to investigate the feasibility of using microchannels formed either on a silicon substrate, or embedded in a glass frit layer, with four different cross-sectional shapes considered. Prior to modeling the microchannels for simulation, the minimum cross-sectional size of a microchannel that fulfills gas feedthrough requirements was calculated and a value of 10 μm was determined based on a flow conductance model. The sealing of the microchannels was simulated using the finite element method (FEM) and the results revealed that flow resistance is a crucial design factor. Thus, embedded microchannel designs were more suitable for the proposed sealing technique than microchannel designs fabricated in silicon.
著作権等: The final publication is available at Springer via http://dx.doi.org/10.1007/s00542-013-1895-8.
This is not the published version. Please cite only the published version.
この論文は出版社版でありません。引用の際には出版社版をご確認ご利用ください。
URI: http://hdl.handle.net/2433/199891
DOI(出版社版): 10.1007/s00542-013-1895-8
出現コレクション:学術雑誌掲載論文等

アイテムの詳細レコードを表示する

Export to RefWorks


出力フォーマット 


このリポジトリに保管されているアイテムはすべて著作権により保護されています。